@article{senkevich2002unique,
  title = {{Unique structure/properties of chemical vapor deposited parylene E}},
  author = {Jay J. Senkevich and Christopher J. Mitchell and Aravind Vijayaraghavan and Edward V. Barnat and John F. McDonald and Toh-Ming Lu},
  journal = {Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films},
  year = {2002},
  volume = {20},
  number = {4},
  pages = {1445--1449},
  doi = {10.1116/1.1487870}
}